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Electronics, Electronics Tools, Laboratory compact sliding horizontal CVD tube furnace with digital gauge and vacuum pump Rapid Thermal Annealing furnace/RTA tube furnace is an affordable and compact PE-CVD (Plasma Enhanced Chemical Vapor Deposition) tube furnace system with slidable mechanism. It consists of a 300W RF plasma generator, a 2O. D split tube furnace and the integrated slidable rail which allows you preheat and slide the furnace ...